SPM3

from €19,900.00

For getting an academic/OEM discount or for getting a quotation, please contact us.

Three axis ultra-high speed nanopositioner.
The Z portion of the SPM3 stage can have up to 50µm travel range and offers the highest speed capabilities available on the market (up to 12.5kHz resonnant frequency). Designed for demanding metrology applications such as Atomic Force Microscopy.

Controller included (USB optional).

Range of motion:
Controller:

For getting an academic/OEM discount or for getting a quotation, please contact us.

Three axis ultra-high speed nanopositioner.
The Z portion of the SPM3 stage can have up to 50µm travel range and offers the highest speed capabilities available on the market (up to 12.5kHz resonnant frequency). Designed for demanding metrology applications such as Atomic Force Microscopy.

Controller included (USB optional).

The SPM3 stage is a 3-axis ultra-high speed nanopositioner, offering a travel range up to 75µm along X and Y with resonant frequencies higher than 2kHz on both axis.
The Z portion of the SPM3 stage can have up to 50µm travel range and offers the highest speed capabilities available on the market with a maximum of 12.5kHz resonant frequencies. Indeed, when used with the high power controller, SPM3.5’s step response time on the Z axis can be smaller than a millisecond. This is why the SPM stage is particularly well suited for demanding metrology applications such as Atomic Force Microscopy.

It can be combined with a coarse positioning Microstage (See our Hybrid System). This nanopositioner is part of our high-speed product line (High power controller available).

XY Specifications

SPM3 (1).png

Z Specifications

SPM3 (2).png

General Specifications

SPM3 (3).png

*Higher load on demand.

Related products