SPM3LR

from €15,200.00

For getting an academic/OEM discount or for getting a quotation, please contact us.

Three axis ultra-high speed nanopositioner.
The Z portion of the SPM3LR stage can have up to 50µm travel range and offers the highest speed capabilities available on the market (up to 12.5kHz resonnant frequency). Designed for demanding metrology applications such as Atomic Force Microscopy.

Controller included (USB optional).

Range of motion:
Controller:

For getting an academic/OEM discount or for getting a quotation, please contact us.

Three axis ultra-high speed nanopositioner.
The Z portion of the SPM3LR stage can have up to 50µm travel range and offers the highest speed capabilities available on the market (up to 12.5kHz resonnant frequency). Designed for demanding metrology applications such as Atomic Force Microscopy.

Controller included (USB optional).

The SPM3LR stage is a 3-axis nanopositioner, offering a travel range of 100µm, 200µm or 300µm along X and Y.
The Z portion of the SPM3LR stage can have up to 50µm travel range and offers the highest speed capabilities available on the market with a maximum resonnant frenquency of 12.5kHz. the SPM3LR.xxx.05’s step response time on the Z axis can be smaller than a millisecond.
The SPM3LR stage is therefore particularly well suited for demanding metrology applications such as Atomic Force Microscopy.

This piezostage can be proposed with a coarse positioning Microstage (See our Hybrid System).

XY Specifications

XY Specifications

Z Specifications

Z Specifications

General Specifications

General Specifications

*Higher load on demand.

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