The LFHS3 is a 3-axis ultra-high speed nanopositioner, offering up to 75µm travel along X and Y, up to 50 µm travel along Z, a large 66 x 66 mm aperture and resonant frequencies higher than 1.5kHz on every axis. This piezostage can be combined with a coarse positionning Microstage (See our Hybrid System).
This nanopositioner is part of our high-speed product line (High power controller available). High speed scans and step response time shorter than 2 ms are possible with the High power controller.